High-NA EUV is ASML's next major lithography platform. It can print finer features than today's EUV tools, which could help chipmakers build denser designs at advanced nodes....

Stitching to be used in the near term future with High-NA tools, but larger 6×12 photomasks envisioned.

Chiptechnologie: Chipmachinemaker ASML smeedt een coalitie van chipfabrikanten om zijn meest geavanceerde High-NA EUV-machine te upgraden, samen met chipgigant TSMC. Het doel:…