Stitching to be used in the near term future with High-NA tools, but larger 6×12 photomasks envisioned.

Intel setzt als erster Chipfertiger ASMLs neueste Lithografie-Systeme ein. Parallel läuft die Entwicklung größerer Masken.

Stitching to be used in the near term future with High-NA tools, but larger 6×12 photomasks envisioned.