ASML, Intel, Samsung, and TSMC back development of 6×12-inch to build large processors using High-NA EUV lithography systems without stitching.

Stitching to be used in the near term future with High-NA tools, but larger 6×12 photomasks envisioned.

Samsung Electronics and Dutch manufacturer of chip equipment ASML said Tuesday they would expand their long-standing partnership on next-generation lithography