China has started producing homegrown immersion deep ultraviolet lithography machines, challenging ASML's dominance, with deliveries expected this year to major Chinese chipmakers.
China ships domestically-built DUV lithography machines to SMIC by year-end, directly challenging ASML's dominance. Supply chains bifurcate: Chinese fabs achieve chip independence under export controls, reshaping global equipment vendor positioning.
The first of these domestically developed machines are expected to be delivered later this year
Jul 28, 2026
11:06 am
What's the storyChina has started manufacturing its own immersion deep ultraviolet (DUV) lithography machines, a critical tool in chip production.
The move comes as a major challenge to Dutch supplier ASML, which has long dominated this market.
China starts limited production of domestic immersion DUV lithography machines as SMIC tests tools from Yuliangsheng, targeting…
Roughly five machines this year and 20 in 2027.
The machines are expected to be delivered this year to leading Chinese chipmakers, including Semiconductor Manufacturing…
Unnamed state-backed firm reportedly targets production of five immersion DUV lithography machines this year, in potential…
Reports that China has started mass-producing homegrown DUV lithography machines actually describe two separate developments…
China is begonnen met de productie van zelfontwikkelde geavanceerde chipmachines. Die zijn belangrijk voor de productie van…
China begins limited production of homegrown immersion DUV lithography machines
China begins mass production of homegrown immersion chipmaking machines in major breakthrough, report claims — first DUV lithography units will be delivered this year to SMIC, Hua Hong, and CXMT
