A Chinese state-backed company based in Shanghai has begun manufacturing immersion deep ultraviolet (DUV) lithography tools, The Information reported, in the first time a mainland China firm has produced this key type of semiconductor production equipment.
The unidentified company assembled development teams from other Chinese firms, including start-up Shanghai Yuliangsheng Technology, to reach the milestone, the report said, citing unnamed people.
The company is aiming to produce five DUV machines this year and 20 next year, but progress on production remains at an early stage, The Information report said.
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Semiconductor bottleneck
