1 of 2 | Researchers at the Korea Institute of Energy Research discuss equipment for producing ultra-high-purity deuterated ammonia. Photo courtesy of Korea Institute of Energy Research
June 11 (Asia Today) -- South Korean researchers have developed a domestic production technology for high-purity deuterated ammonia, a key material used in semiconductor manufacturing, the Korea Institute of Energy Research said Wednesday.
The institute said a research team led by Yoon Hyung-chul succeeded in producing 7.7 kilograms of deuterated ammonia a day using a ruthenium catalyst developed by the team.
Deuterated ammonia, or ND₃, is a form of ammonia in which hydrogen atoms are replaced with deuterium, a stable isotope of hydrogen. When used in semiconductor manufacturing, the material can help suppress defects inside semiconductor devices.
South Korea has lacked the technology and facilities to produce deuterated ammonia domestically, leaving the country dependent on imports from Japan, China and other countries.
