Semiconductor metrology startup Invisix has raised €20 million ($23m) in a seed funding round to support its soft x-ray technology.
The company, which is based in Eindhoven, in the Netherlands, has been developing the technology inside ASML since 2015. In 2025 it was spun out into Invisix by Christina Porter and Sietse van der Post, ASML's respective CEO and CTO.
– Invisix
The round was supported by Hitachi Ventures, Transition Ventures, imec.xpand, Doosan Investment Co., and a “tier-one” semiconductor manufacturer.
Invisix has developed a soft x-ray platform, designed to inspect the internal structures of chips without damaging the devices. Its metrology system is based on High Harmonic Generation (HHG) and powered by technology licensed from ASML.
