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Beyond lithography: Chinese chip toolmaker achieves wafer polishing breakthrough
While global attention focuses on the most advanced bottlenecks, domestic equipment makers are quietly closing the gap in other essential technologies.
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scmp.com
Beyond lithography: Chinese chip toolmaker achieves wafer polishing breakthrough
While global attention focuses on the most advanced bottlenecks, domestic equipment makers are quietly closing the gap in other essential technologies.
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thenextweb.com
China's CMP breakthrough is real. It's also only six inches wide.
Hwatsing built China's first metrology system integrated with wafer polishing equipment. The six-inch format places it well short of advanced logic.