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Monolithic three-dimensional integration of silicon transistors - Nature
Uniformly doped, ultrathin single-crystalline silicon nanomembranes can be vertically stacked at low temperature using a roll-transfer-printing process that is scalable to wafer scale and tolerant to substrate topology and surface roughness for constructing high-performance monolithic three-dimensional integrated circuits.
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nature.com
Monolithic three-dimensional integration of silicon transistors - Nature
Uniformly doped, ultrathin single-crystalline silicon nanomembranes can be vertically stacked at low temperature using a roll-transfer-printing process that is scalable to wafer…
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Transistors on a roll: 3D circuits built from stacks of flexible membranes
Stacks of transistors built from nanomembranes that can be rolled onto a substrate have been used to fabricate 3D circuits.
